Microcantilevers for Thermal NanoImaging and Thermomechanical Surface Modification
W.P. King, T.W. Kenny, K.E. Goodson, M. Despont, U. Duerig, M. Lantz, H. Rothuizen, G. Binnig, and P. Vettiger, 2002, "Microcantilevers for Thermal NanoImaging and Thermomechanical Surface Modification," Proceedings 2002 Workshop on Solid State Sensors, Actuators and Microsystems, Hilton Head, p. 210.