Dielectric Barrier Layers by Low-temperature Plasma-enhanced Atomic Layer Deposition of Silicon Dioxide
Barako, M.T., English, T.S., Roy-Panzer, S., Kenny, T.W., and Goodson, K.E., 2018, “Dielectric Barrier Layers by Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Silicon Dioxide,” Thin Solid Films, Vol. 649, pp. 24-29.